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Sains Malaysiana 55(1)(2026): 143-154
http://doi.org/10.17576/jsm-2026-5501-11
Kesan Kadar Aliran Nitrogen Teknik RF-PECVD terhadap Morfologi, Sifat Kimia dan Prestasi Penjerapan CO2 Komposit ZSM-5/a-CNx (Effect of Nitrogen Flow Rate of RF-PECVD Technique on Morphology, Chemical Properties and CO2 Adsorption Performance of ZSM-5/a-CNx Composites)
ANIN SOFYA MOHD AKHIRI1,
NURUL IMANINA MOHD AZLAN1, ZALITA ZAINUDDIN1,
1Jabatan Fizik Gunaan, Fakulti Sains dan
Teknologi, Universiti Kebangsaan Malaysia, 43600 UKM Bangi, Selangor, Malaysia
2Jabatan Sains
Kimia, Fakulti Sains dan Teknologi, Universiti Kebangsaan Malaysia, 43600 UKM
Bangi, Selangor, Malaysia
Diserahkan: 30 September 2025/Diterima: 18 Januari
2026
Penyelidikan ini dijalankan untuk mengkaji kesan kadar
aliran gas nitrogen terhadap morfologi, sifat kimia dan prestasi penjerapan CO2 komposit ZSM-5/a-CNx. Kepingan ZSM-5 disediakan melalui teknik tekanan sepaksi,
seterusnya filem nipis a-CNx dimendapkan di atasnya dengan ubahan nisbah kadar
aliran gas CH4:N2 pada 50:30, 50:40, 50:50 dan 50:60 sccm
untuk menghasilkan sampel komposit ZSM-5/a-CNx. Mikrograf FESEM menunjukkan ciri
morfologi ZSM-5 yang berbucu tajam dan berongga masih terpelihara selepas
proses pemadatan, manakala permukaan komposit berubah kepada tekstur yang lebih
homogen akibat pemendapan filem nipis a-CNx. Analisis data BET memperlihatkan
penurunan luas permukaan khusus dan isi padu liang bersaiz mikro akibat penutupan
sebahagian liang akibat proses pemendapan filem nipis a-CNx. Namun begitu, isi padu
liang kumulatif kekal hampir tidak berubah dan menandakan pemendapan filem
nipis berjaya mengekalkan sebahagian besar struktur liang ZSM-5. Analisis data FTIR
mengesahkan penghasilan komposit ZSM-5/a-CNx melalui kehadiran ikatan C-H, C=C,
C=N dan C-N. Analisis data TPD pula menunjukkan kapasiti penjerapan CO2 tertinggi (212.04 cm3/g) oleh sampel komposit ZSM-5/a-CNx yang
disediakan pada kadar aliran N2 30 sccm, iaitu peningkatan sebanyak 12.46% berbanding
ZSM-5 asli. Keputusan kajian ini mendapati bahawa jenis dan konfigurasi
kumpulan berfungsi nitrogen memainkan peranan yang lebih penting berbanding
jumlah kandungan nitrogen secara keseluruhan. Dalam kajian ini, kumpulan
berfungsi C=N didapati berupaya menyediakan tapak bes yang kuat bagi
meningkatkan prestasi penjerapan CO2 secara kimia, sekali gus
menekankan potensi komposit ZSM-5/a-CNx dalam pembangunan bahan penjerap karbon
yang lebih cekap.
Kata kunci: BET; FTIR; TPD;
penangkapan karbon
Abstract
This study was conducted to investigate the effect of
nitrogen flow rate on the morphology, chemical properties, and CO2 adsorption performance of ZSM-5/a-CNx composites. ZSM-5 pellets were prepared
using a uniaxial pressing technique, followed by deposition of a-CNx thin film
by varying the CH4:N2 gas flow ratio at 50:30, 50:40,
50:50, and 50:60 sccm to produce the ZSM-5/a-CNx composite samples. FESEM
micrographs showed that the sharp-edged and porous morphological features of
ZSM-5 were preserved after compaction, while the composite surfaces became more
homogeneous due to the a-CNx thin-film deposition. BET analysis showed a decrease
in specific surface area and micropore volume due to partial pore closure from
the deposition of a-CNx thin film. However, the cumulative pore volume remained
slightly unchanged indicating that the thin film deposition successfully
preserved most of the porous framework of ZSM-5. FTIR data confirmed the
successful deposition of a-CNx thin film through the presence of C-H, C=C, C=N,
and C-N bonds. TPD data demonstrated the highest CO2 adsorption
capacity (212.04 cm3/g) was achieved by the sample prepared at the
lowest nitrogen flow rate (30 sccm), representing a 12.46% increase compared to
pristine ZSM-5. Our findings found that the type and configuration of nitrogen
functional groups play a more critical role than total nitrogen content in
determining surface basicity. In this study, the C=N functionality was found to
be able to provide strong basic sites to enhance CO2 chemisorption
performance, thus emphasizing the potential of the ZSM-5/a-CNx composite in the
development of more efficient CO2 adsorbents.
Keywords: BET; FTIR; TPD;
carbon capture
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*Pengarang untuk surat-menyurat; email: rozida@ukm.edu.my
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